ASMPT is dedicated to the development of semiconductor meeting and packaging tools and provides options for industrial automation in a variety of semiconductor functions. It operates in over 30 international locations with analysis facilities, manufacturing services, and industrial places of work spanning Asia, Europe, and the Americas. Extra not too long ago, ASMPT expanded by way of a sequence of focused enterprise acquisitions, including a number of tools manufacturers together with ALSI, AMICRA, NEXX, and the AEi staff. These acquisitions have enabled them to offer prospects with a broader vary of course of options.
Renishaw’s relationship with ASMPT is now in its twenty fifth 12 months. Each firms have gathered intensive shared expertise in areas comparable to place encoder functions, custom-made options, and machine testing for high quality management, whereas constructing an in depth enterprise relationship.
Problem
Trendy semiconductor packaging and meeting processes require demanding efficiency in place accuracy and stability, machine measurement and weight, high quality management, and course of throughput. Place encoders play a vital position in movement management, and suppliers must develop new applied sciences and introduce modern options to satisfy the rigorous calls for of this market.
Within the realm of meeting and packaging course of tools, choosing the suitable encoder is vital. ASMPT highlights a number of important options that consumers ought to think about:
Answer
ASMPT has employed varied Renishaw encoder merchandise over time together with the ATOM DX and VIONiC incremental encoder sequence and the RESOLUTE absolute encoder sequence. These encoders are utilized in a variety of meeting and packaging course of tools together with ASMPT’s INFINITE — a 12-inch die bonder designed for basic IC (built-in circuit) packaging. This superior system boasts modern options comparable to exact epoxy allotting management and inspection capabilities for measuring bond line thickness with micron-level accuracy.
ASMPT’s INFINITE die bonding machine
As a vital part in movement management methods, wonderful encoder efficiency is prime to assembly the rigorous and rising calls for of the market. A major instance of an necessary encoder specification is the dimensions of the readhead and interface. Again-end semiconductor manufacturing refers back to the last processes, comparable to die bonding and wire bonding, after all of the options on the silicon wafer have been created. Contemplating that back-end tools can accommodate as much as twenty readheads, it’s important to reduce the affect of the house occupied by these interfaces inside the machine design.
“Given the appliance necessities of sure superior packaging manufacturing tools, it turns into crucial to make the most of supplies that exhibit much less sensitivity to temperature for the working head; in different phrases, we want supplies with a low thermal growth coefficient,” defined Dr. Joseph Choy, Senior Analysis and Growth Director at ASMPT. “Nonetheless, these supplies are sometimes heavier, which will increase the general tools weight and introduces challenges in controlling inertia. Renishaw’s ATOM DX encoder sequence solves this drawback and considerably reduces the house occupied and weight, whereas bettering the pliability of our tools design course of.”
Dr Joseph Choy, Senior Analysis and Growth Director at ASMPT
The ATOM DX encoder immediately outputs digital alerts from the readhead and integrates all place suggestions, onboard interpolation, and optical filtering capabilities inside its miniature package deal. The readhead is designed to be extraordinarily compact, with a minimal packaged measurement of 20.5 mm x 12.7 mm x 7.85 mm, permitting for set up in very small areas with out the necessity for extra connecting interfaces, saving important house on ASMPT machines. The ATOM DX encoder sequence delivers wonderful efficiency with a decision of as much as 2.5 nm and benefits comparable to low Sub-Divisional Error (SDE) and low sign jitter.
To streamline upkeep procedures, precision semiconductor manufacturing tools usually encompasses a design that enables the cables to be indifferent from the encoder readheads inside a module. These cables are then related to the controller by way of an middleman connector. This design allows swift alternative of your entire module within the occasion of a failure, minimizing downtime. Renishaw provides a spread of encoder cables with completely different connector choices for patrons. These choices embrace smaller-sized round connectors or flying leads that may be soldered by the shopper in line with their particular necessities.
System diagnostics
Sometimes, the setup LED on the encoder readhead offers ample standing info to make sure a profitable set up. In tougher set up eventualities, Renishaw’s Superior Diagnostic Software (ADT) can present extra real-time information reporting, aiding set up and diagnostics. The ADT has thus performed a pivotal position in ASMPT’s tools improvement and manufacturing processes, notably for its high-end tools fashions.
“Renishaw’s ADT has been immensely useful for us, permitting our engineers to shortly set up the set up standing of encoders and establish the basis reason for issues by assessing sign power variations at completely different positions,” affirmed Ir George Chan, ASMPT Technical Supervisor.
Renishaw optical encoder vary
Abstract
The manufacture of meeting and packaging tools faces important challenges associated to high quality management and productiveness.
High quality management is essential within the manufacture of course of tools because it ensures specs and reliability requirements are met, ensures course of consistency, and helps to reduce defects and variation.
ASMPT has launched new merchandise designed to satisfy rising demand for semiconductors as a consequence of rising applied sciences. Renishaw, a long-standing metrology provider, provides intensive expertise in high quality management, encoders, and customised options. Encoder options embrace the ATOM DX miniature incremental encoder sequence, the VIONiC incremental encoder sequence, in addition to the RESOLUTE absolute encoder sequence.
Renishaw’s Superior Diagnostic Software (ADT) and readhead setup LEDs additionally play an necessary position in encoder set up and diagnostics.
These metrology merchandise make sure the optimum degree of course of tools efficiency and effectivity.
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